Time-resolved monitoring of ZnO plume by ArF laser ablation: influence of surrounding gas

Yoshizo Kawaguchi; Aiko Narazaki; Tadatake Sato; Hiroyuki Niino

doi:10.1117/12.486563

19 February 2003 Time-resolved monitoring of ZnO plume by ArF laser ablation: influence of surrounding gas

Yoshizo Kawaguchi, Aiko Narazaki, Tadatake Sato, Hiroyuki Niino

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486563
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

We have investigated dynamics of ablated species in ZnO plume under ArF excimer laser irradiation with emission imaging and spectroscopy, and discussed the effect of a surrounding inert gas. Surrounding He or Ar gas strongly cools down the plume and encourages aggregation of ablated species, which is visualized by second laser irradiation to the plume.

Citation Download Citation

Yoshizo Kawaguchi, Aiko Narazaki, Tadatake Sato, and Hiroyuki Niino "Time-resolved monitoring of ZnO plume by ArF laser ablation: influence of surrounding gas", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486563

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