Toward nanoprocess applications with laser-cooled silicon atoms

Hiroshi Kumagai; Yuichi Asakawa; Katsumi Midorikawa; Minoru Obara

doi:10.1117/12.486587

19 February 2003 Toward nano-process applications with laser-cooled silicon atoms

Hiroshi Kumagai, Yuichi Asakawa, Katsumi Midorikawa, Minoru Obara

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486587
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

We have developed an all-solid-state 252nm coherent light source for laser cooling of silicon atoms with tow-stage highly efficient frequency conversions with external cavities. With the coherent light source, it is possible to manipulate the atomic motion of the silicon atoms towards nano-process applications. In this paper, deflection, collimation, and axial velocity selection of the silicon atomic beam with the coherent light source are discussed.

Citation Download Citation

Hiroshi Kumagai, Yuichi Asakawa, Katsumi Midorikawa, and Minoru Obara "Toward nano-process applications with laser-cooled silicon atoms", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486587

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