Microlithographic lens for DUV scanner

Tomoyuki Matsuyama; Yuichi Shibazaki

doi:10.1117/12.486476

23 December 2002 Microlithographic lens for DUV scanner

Proceedings Volume 4832, International Optical Design Conference 2002; (2002) https://doi.org/10.1117/12.486476
Event: International Optical Design Conference 2002, 2002, Tucson, AZ, United States

Abstract

This paper describes several kinds of new technologies introduced into the latest microlithographic lens system for Nikon's DUV (Deep Ultra Violet) scanner.

Citation Download Citation

Tomoyuki Matsuyama and Yuichi Shibazaki "Microlithographic lens for DUV scanner", Proc. SPIE 4832, International Optical Design Conference 2002, (23 December 2002); https://doi.org/10.1117/12.486476

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