Translator Disclaimer
Paper
17 February 2003 Automated alignment for free-space optical systems based on micro-optical-electro-mechanical systems
Author Affiliations +
Proceedings Volume 4833, Applications of Photonic Technology 5; (2003) https://doi.org/10.1117/12.474871
Event: Applications of Photonic Technology 5, 2002, Quebec City, Canada
Abstract
The emerging technology of micro-optical-electro-mechanical systems (MOEMS) offer promise for automating the alignment of free-space optical systems, especially intra-computer optical interconnects. MOEMS-based microlenses and micromirrors have been fabricated for the purpose of providing initial system alignment and dynamic alignment.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John A. Neff, Jianglong Zhang, Adisorn Tuantranont, Yijing Fu, Yung-Cheng Lee, and Victor M. Bright "Automated alignment for free-space optical systems based on micro-optical-electro-mechanical systems", Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003); https://doi.org/10.1117/12.474871
PROCEEDINGS
12 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

Optical MEMS for Earth observation
Proceedings of SPIE (November 20 2017)
Design of electrostatic actuators for MOEMS applications
Proceedings of SPIE (April 19 2002)
Multiple methods of modeling MEMS
Proceedings of SPIE (May 19 2005)
SiGe micromirrors for optical applications
Proceedings of SPIE (September 22 2010)
Large silicon micromirror modeling and fabrication
Proceedings of SPIE (January 22 2005)

Back to Top