Rugate filters grown by glancing angle deposition

Kate Kaminska; Tim Brown; Gisia Beydaghyan; Kevin Robbie

doi:10.1117/12.474335

17 February 2003 Rugate filters grown by Glancing Angle Deposition

Kate Kaminska, Tim Brown, Gisia Beydaghyan, Kevin Robbie

Proceedings Volume 4833, Applications of Photonic Technology 5; (2003) https://doi.org/10.1117/12.474335
Event: Applications of Photonic Technology 5, 2002, Quebec City, Canada

Abstract

Recent progress in thin film optical coating technology has enabled more complex filter designs and better control of out of band interference. One of the most significant advances in optical filters has been the manufacture of rugate filter designs based on sinusoidal variation of refractive index. The realization of a rugate filter requires a means of depositing an optical material whose refractive index can be significantly varied over a wide range, while having precise control of the index. The Glancing Angle Deposition (GLAD) technique satisfies these requirements by allowing fabrication of films with nano-engineered morphology whose optical properties can be tailored. GLAD is based on thin film physical vapor deposition by evaporation and employs oblique angle flux and substrate motion to allow nanometer scale control of structure and optical properties. Silicon rugate filter prototypes were made according to design specifications using computer control of deposition parameters which influence the film optical response.

Citation Download Citation

Kate Kaminska, Tim Brown, Gisia Beydaghyan, and Kevin Robbie "Rugate filters grown by Glancing Angle Deposition", Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003); https://doi.org/10.1117/12.474335

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