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17 February 2003 Toward realization of photonic bandgap materials with glancing angle deposition
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Proceedings Volume 4833, Applications of Photonic Technology 5; (2003)
Event: Applications of Photonic Technology 5, 2002, Quebec City, Canada
A modern challenge of materials science and physics is the creation and understanding of photonic crystals. Glancing Angle Deposition (GLAD) enables the growth of thin film materials with designable morphological structure on the scale of tens of nanometers, similar to proposed geometries of photonic crystals. Here we present recent progress toward the realization of photonic crystals with GLAD. Square spiral films of silicon were fabricated with GLAD, and were analyzed with scanning electron microscopy (SEM) and spectroscopic ellipsometry. The SEM images clearly show a periodic and spiral structure, similar to that recently predicted to have a robust three-dimensional bandgap. Ellipsometric analysis is ongoing, with as yet no distinct features that might suggest photonic bandgaps. To measure and control the in-plane ordering of silicon thin films, we have deposited and characterized pillar microstructures, producing an indirect measurement of film porosity with varying flux incidence. Two dimensional Fourier transforms were applied to plan view SEM images of porous pillar microstructures, showing no regular lattice but a broad ring that suggests a short range average spacing. In-plane periodicities were observed up to 100nm. Ongoing research is toward fabricating and analyzing photonic crystal structures at visible and infrared wavelengths.
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Gisia Beydaghyan, Kate Kaminska, Tim Brown, and Kevin Robbie "Toward realization of photonic bandgap materials with glancing angle deposition", Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003);

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