System-level simulation of micromirrors for adaptive optics

Julien Charton; Zoltan Hubert; Eric Stadler; Wilfrid Schartz; Jean-Luc Beuzit

doi:10.1117/12.458104

30 January 2003 System level simulation of micro-mirrors for adaptive optics

Julien Charton, Zoltan Hubert, Eric Stadler, Wilfrid Schartz, Jean-Luc Beuzit

Proceedings Volume 4842, Specialized Optical Developments in Astronomy; (2003) https://doi.org/10.1117/12.458104
Event: Astronomical Telescopes and Instrumentation, 2002, Waikoloa, Hawai'i, United States

Abstract

Electrostatically actuated micro-mirrors represent one of the most promising technologies for future adaptive optics systems. Due to their relatively high prototyping cost and long fabrication cycle, simulation is one of the key points of their design and optimization. Finite element analysis, behavioral modeling and electronic CAD packages are generally used to study each part of the mirror. This paper shows how the emerging VHDL-AMS language can be used to combine all these simulation tools, and obtain a dynamical simulation of the complete micro-mirror device. This model can then be used as a tool to optimize the characteristics of the mirror and its control electronics to match the specifications of various adaptive optics systems.

Citation Download Citation

Julien Charton, Zoltan Hubert, Eric Stadler, Wilfrid Schartz, and Jean-Luc Beuzit "System level simulation of micro-mirrors for adaptive optics", Proc. SPIE 4842, Specialized Optical Developments in Astronomy, (30 January 2003); https://doi.org/10.1117/12.458104

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