Application of spectral reflectivity to the measurement of thin-film thickness

Tony Flaherty; Gerard M. O'Connor

doi:10.1117/12.464264

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27 August 2003 Application of spectral reflectivity to the measurement of thin-film thickness

Tony Flaherty, Gerard M. O'Connor

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Proceedings Volume 4876, Opto-Ireland 2002: Optics and Photonics Technologies and Applications; (2003) https://doi.org/10.1117/12.464264
Event: OPTO Ireland, 2002, Galway, Ireland

Abstract

The aim of this work is to investigate the application of the spectral reflectance technique to thickness measurement of highly localised semi-transparent coatings on miniature geometries, such as those used in the medical devices industry. The paper will describe the application of the technique to coatings on curved or non-uniform surfaces such as narrow-bore metal tubes and thin wires. The paper will describe the equipment used including a spectrometer with micro-focus attachment, and optical modelling software. This work also involved laser-drilling of the polymer films to allow complementary step-height measurements to be made. Special steps were also required to overcome problems in measurement due to the transparency of the thin films. Complementary techniques including white-light interferometry, which were used to benchmark the method, will also be described.

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Tony Flaherty and Gerard M. O'Connor "Application of spectral reflectivity to the measurement of thin-film thickness", Proc. SPIE 4876, Opto-Ireland 2002: Optics and Photonics Technologies and Applications, (27 August 2003); https://doi.org/10.1117/12.464264

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