LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer

Dean V. Wiberg; Nosang V. Myung; Beverley Eyre; Kirill Shcheglov; Otto J. Orient; Eric Moore; Philip Munz

doi:10.1117/12.520540

25 July 2003 LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer

Dean V. Wiberg, Nosang V. Myung, Beverley Eyre, Kirill Shcheglov, Otto J. Orient, Eric Moore, Philip Munz

Author Affiliations +

Proceedings Volume 4878, First Jet Propulsion Laboratory In Situ Instruments Workshop; (2003) https://doi.org/10.1117/12.520540
Event: First Jet Propulsion Laboratory In Situ Instruments Workshop, 2003, Bellingham, United States

Abstract

A 3X3 array of hyperboloid quadrupole mass filters with a 3 mm pole length was fabricated using the LIGA (LIthographic Galvanoformung and Abformung) process. Electrical connectivity and spatial orientation are established by bonding the pole array to a low temperature co-fired ceramic (LTCC) substrate. A miniature scroll pump for vacuum pumping with a scroll height of 3 mm was also fabricated using the LIGA process. New LIGA fabrication steps (e.g. expose and developed freestanding PMMA, compression bonding of electroplating base and PMMA, low-stress electroplated films) have been developed to fabricate ultra thick PMMA molds with high aspect ratios (70:1) and high precision. Computational analysis was performed to estimate the miniature scroll pump performance characteristics.

Citation Download Citation

Dean V. Wiberg, Nosang V. Myung, Beverley Eyre, Kirill Shcheglov, Otto J. Orient, Eric Moore, and Philip Munz "LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer", Proc. SPIE 4878, First Jet Propulsion Laboratory In Situ Instruments Workshop, (25 July 2003); https://doi.org/10.1117/12.520540

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