Temperature-dependent spectral ellipsometry: a powerful technique for thin film investigations

Alexandr Deineka; Petr Pokorny; Lubomir Jastrabik; Gunnar Suchaneck; Gerald Gerlach

doi:10.1117/12.475877

22 July 2002 Temperature-dependent spectral ellipsometry: a powerful technique for thin film investigations

Alexandr Deineka, Petr Pokorny, Lubomir Jastrabik, Gunnar Suchaneck, Gerald Gerlach

Proceedings Volume 4888, First International Workshop on Classical and Quantum Interference; (2002) https://doi.org/10.1117/12.475877
Event: First International Workshop of Research Center for Optics on Classical and Quantum Interference, 2001, Olomouc, Czech Republic

Abstract

In this work, determination of the refractive index profile and the optical gap E02 of PbZr1-XTiO3 thin films is described. Measurements were performed with the J. A Woollam spectral ellipsometer working on rotate analyzer mode. The temperature dependence of optical constants was obtained with a specially designed heating device.

Citation Download Citation

Alexandr Deineka, Petr Pokorny, Lubomir Jastrabik, Gunnar Suchaneck, and Gerald Gerlach "Temperature-dependent spectral ellipsometry: a powerful technique for thin film investigations", Proc. SPIE 4888, First International Workshop on Classical and Quantum Interference, (22 July 2002); https://doi.org/10.1117/12.475877

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