Author Affiliations +
Laurent Dieu,1 Eric L. Fanucchi,1 Greg P. Hughes,1 John G. Maltabes,2 David L. Mellenthin,1 Will Conley,2 Lloyd C. Litt,2 Kevin Lucas,2 Robert John Socha,3 Kurt E. Wampler,3 Arjan Verhappen,3 Jan-Pieter Kiujten3
1DuPont Photomasks, Inc. (United States)
2Motorola, Inc. (United States)
3ASML (United States)