Digital image processor for complex shape metrology

Qi-De Qian

doi:10.1117/12.467779

27 December 2002 Digital Image Processor for Complex Shape Metrology

Qi-De Qian

Proceedings Volume 4889, 22nd Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.467779
Event: Photomask Technology 2002, 2002, Monterey, CA, United States

Abstract

In this paper, we apply image-processing techniques to the task of metrology on complex shapes. We describe techniques for noise reduction, edge detection, and feature contour extraction on scanning electron microscope images. We present a novel capability for calculating the area of an arbitrary shape. We demonstrate imaged based metrology capabilities using examples encountered in photomask processing.

Citation Download Citation

Qi-De Qian "Digital Image Processor for Complex Shape Metrology", Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); https://doi.org/10.1117/12.467779

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