High-resolution photomask phase measurement tool

Andrew J. Merriam; James J. Jacob

doi:10.1117/12.467846

27 December 2002 High-Resolution Photomask Phase Measurement Tool

Andrew J. Merriam, James J. Jacob

Author Affiliations +

Proceedings Volume 4889, 22nd Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.467846
Event: Photomask Technology 2002, 2002, Monterey, CA, United States

Abstract

We describe the application of a novel imaging technique to ultra-high spatial resolution measurements of photomask phase shift. An Actinix TMT-193 photomask transmission tool has been retrofitted with a breadboard Mach-Zehnder interferometer and ancillary signal detection electronics and software to demonstrate actinic phase shift measurement capability for ArF-generation photomasks. Using a simple proof-of-principle layout, we have successfully acquired high-contrast interference fringe data on ultra-high resolution (250 nm) photomask geometries. Minimum detectable feature sizes are limited only by the resolution of the imaging system. The measurement techniques are suited to both embedded-attenuator and alternating-aperture phase-shift masks, and may be directly applied to F2-generation mask tools. Engineering advances in the laser source will increase measurement precision to the 0.4° level as called for in the 2001 ITRS. We discuss the tool architecture and measurement method, and present recent results of phase scans performed on a customer-supplied MoSi EAPSM.

Citation Download Citation

Andrew J. Merriam and James J. Jacob "High-Resolution Photomask Phase Measurement Tool", Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); https://doi.org/10.1117/12.467846

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE