Integrating CD and lithographic process window analysis with mask data preparation for subwavelength ICs

Devendra Joshi; Danny Keogan; James Kenneth Falbo

doi:10.1117/12.467847

27 December 2002 Integrating CD and Lithographic Process Window analysis with Mask Data Preparation for Subwavelength ICs

Devendra Joshi, Danny Keogan, James Kenneth Falbo

Author Affiliations +

Proceedings Volume 4889, 22nd Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.467847
Event: Photomask Technology 2002, 2002, Monterey, CA, United States

Abstract

As the industry accelerates the reduction in sub-wavelength device feature sizes, it is necessary that the traditional barriers between design, mask data preparation (MDP), and the lithography process be broken down or eliminated. These processes, which now possess increased levels of complexity and interconnectivity, can no longer work independently but must be linked and all applicable information about the processes propagated upstream. Options associated with phase shift masks, optical proximity correction, increasing constraints for the minimum defect size requirements, improving yield and throughput, etc. have been key to the increased demands placed on the photomask manufacturers. Knowledge of the lithographic performance of a selected option prior to mask build is key to reducing mask cost, improving turn around time and staying on the aggressive path established by the mask user. Integrating CD and lithographic process window analysis with MDP provides a convenient means of helping the mask makers to predict the performance of a mask within the wafer fab. This paper will discuss the integration of CD and lithographic process window analysis tools with CATS mask data preparation software. The benefits of implementing this methodology will be explored and illustrated with data.

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Devendra Joshi, Danny Keogan, and James Kenneth Falbo "Integrating CD and Lithographic Process Window analysis with Mask Data Preparation for Subwavelength ICs", Proc. SPIE 4889, 22nd Annual BACUS Symposium on Photomask Technology, (27 December 2002); https://doi.org/10.1117/12.467847

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