New profile recovery algorithm with high lateral resolution using spline smoothing

Xiaojun Liu; Yongsheng Gao

doi:10.1117/12.484459

29 July 2002 New profile recovery algorithm with high lateral resolution using spline smoothing

Xiaojun Liu, Yongsheng Gao

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484459
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

A new method to improve the lateral resolution of differential profile measurement is proposed, together with a related profile recovery algorithm. In this method, the lateral resolution will not be constrained to the distance between two differential probes. It can be a fraction of the distance and is affected by the scanning resolution. In the corresponding algorithm to recover a profile, d is the probes distance, dr 5 the scanning resolution, and dr = d/N,where N is the number of groups separated from the difference data set. Integration is applied to every group to build a profile. Finally, spline smoothing regression is used to the profiles to find translations between them to obtain the whole profile. Computer stimulation was used to examine the effectiveness of the proposed recovery algorithm and good accuracy was achieved.

Citation Download Citation

Xiaojun Liu and Yongsheng Gao "New profile recovery algorithm with high lateral resolution using spline smoothing", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484459

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