Design of a calibration machine of optical two-dimensional length standards

Bjorn Hemming; Ilkka Palosuo; Antti Lassila

doi:10.1117/12.467631

18 October 2002 Design of a calibration machine for optical two-dimensional length standards

Bjorn Hemming, Ilkka Palosuo, Antti Lassila

Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467631
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany

Abstract

Optical measurements with coordinate measurement machines equipped with optical sensors, and video measurement machines, are clearly increasing in industry. Accurately manufactured two-dimensional standards, with a precision typically between 0.05 μm and 5μm, are used to check and calibrate these measuring machines. In order to start a calibration service for two-dimensional standards, a new calibration machine is currently under development at the Centre for Metrology and Accreditation (MIKES). In this paper we describe the mechanical design, properties and present a detailed uncertainty analysis of position measurement. By modeling and compensating mechanical error sources the required standard uncertainty level of 50 nm is achievable.

Citation Download Citation

Bjorn Hemming, Ilkka Palosuo, and Antti Lassila "Design of a calibration machine for optical two-dimensional length standards", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); https://doi.org/10.1117/12.467631

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