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18 October 2002 A micromechanical mirror based on PZN-PT single crystal films
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Proceedings Volume 4902, Optomechatronic Systems III; (2002)
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany
This paper presents an investigation of a stand-alone PZN-PT film-based movable micro-mirror and characterizes its precision level. Micro-mirrors have received considerable attention for applications in various micro-opto-electro-mechanical systems (MOEMS). For example, there is considerable interest in creating micro-mirror arrays for image display and telecommunication applications. Such optical applications require high precision position control of micro-mirrors. We present the development of stand-alone self-moving micro-mirrors on the basis of a single-film actuation mechanism. The mirror design provides for tilt motion using a single-crystal Pb(Zn1/3Nb2/3)O3-PbTiO3 (PZN-PT) film unimorph actuator. A prototype micro-mirror plate is designed to a size of 600 × 400 × 10 μm3 including actuation device. In this paper, it is shown that a prototype micro-mirror fabricated in our laboratories can be operated at frequency of 50 kHz.
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Kee S. Moon, Miguel Levy, Yong K. Hong, and Shankar Ghimire "A micromechanical mirror based on PZN-PT single crystal films", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002);

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