Fabrication of AlGaN/GaN high-electron-mobility transistors

Tong Wu; Zhi-Biao Hao; Wenping Guo; Shu-Wei Wu; Yi Luo; Qing-Ming Zeng; Xian-Jie Li

doi:10.1117/12.481021

29 August 2002 Fabrication of AlGaN/GaN high-electron-mobility transistors

Tong Wu, Zhi-Biao Hao, Wenping Guo, Shu-Wei Wu, Yi Luo, Qing-Ming Zeng, Xian-Jie Li

Proceedings Volume 4905, Materials and Devices for Optical and Wireless Communications; (2002) https://doi.org/10.1117/12.481021
Event: Asia-Pacific Optical and Wireless Communications 2002, 2002, Shanghai, China

Abstract

In this paper, the growth and device fabrication of AIGaN/GaN HEMTs are investigated by using Metal-Organic Vapor Phase Epi taxy (MOVPE) system. The grown wafer consists of a 3-μm-thick unintentionally doped GaN buffer layer, an undoped AIGaN spacer layer, and a n-doped Al_0.28Ga_0.72N cap layer. The growth condition and the wafer structure are optimized for high performance devices. The devices exhibit a maximum saturation current density of 1000 mA/mm, good pinch off at -5V gate bias and a peak extrinsic transconductance of 180 mS/mm. Further efforts to improve the device performance are also discussed.

Citation Download Citation

Tong Wu, Zhi-Biao Hao, Wenping Guo, Shu-Wei Wu, Yi Luo, Qing-Ming Zeng, and Xian-Jie Li "Fabrication of AlGaN/GaN high-electron-mobility transistors", Proc. SPIE 4905, Materials and Devices for Optical and Wireless Communications, (29 August 2002); https://doi.org/10.1117/12.481021

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available