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3 September 2002 Fabrication of planar blazed grating using laser LIGA
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Proceedings Volume 4907, Optical Switching and Optical Interconnection II; (2002) https://doi.org/10.1117/12.482276
Event: Asia-Pacific Optical and Wireless Communications 2002, 2002, Shanghai, China
Abstract
We study the design of planar micro-grating and propose a new approach to fabricate planar micro-grating. By the basic grating diffractive theory (rigorous coupled wave theory), suitable and optimized structure (within our manufacturing capabilities) of grating for our application is found. The fabrication of planar micro-grating is demonstrated by Laser LIGA technology, using the instrument of KrF (248 nm) excimer laser system. The micro-grating with the continuous smooth profile and the pitch 2.5 ?m is shown.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chi-Feng Chen, Rui-Ting Zheng, and Bor-Hong Yao "Fabrication of planar blazed grating using laser LIGA", Proc. SPIE 4907, Optical Switching and Optical Interconnection II, (3 September 2002); https://doi.org/10.1117/12.482276
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