Grating fabrication with CW CO2 laser irradiation

Dongjiang Wu; Chengwu An; Ming Hui Hong; W. J. Wang; Yingzi Peng; Yongfeng Lu

doi:10.1117/12.482897

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12 September 2002 Grating fabrication with CW CO₂ laser irradiation

Dongjiang Wu, Chengwu An, Ming Hui Hong, W. J. Wang, Yingzi Peng, Yongfeng Lu

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Proceedings Volume 4915, Lasers in Material Processing and Manufacturing; (2002) https://doi.org/10.1117/12.482897
Event: Photonics Asia, 2002, Shanghai, China

Abstract

In this paper, we will describe a new method to fabricate optical diffractive gratings on glass surface with direct CW CO2 laser irradiation. A laser beam with linear polarization was focused and scanned on a glass substrate. The interaction of the beam with the material irradiated results in a periodic ridge structure formation on the substrate under a well-controlled laser irradiation dose. Using multi-path scanning method, with a suitable overlap, diffractive grating with large area can be achieved. In this experiment, laser irradiation dose was 50 J/cm2, laser scanning speed was 0.2 mm/s, the diameter of focused beam was 30 ?m, and the grating period was about 8 ?m.

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Dongjiang Wu, Chengwu An, Ming Hui Hong, W. J. Wang, Yingzi Peng, and Yongfeng Lu "Grating fabrication with CW CO₂ laser irradiation", Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); https://doi.org/10.1117/12.482897

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