Microprocessing by UV laser

Qihong Lou; Tiejun Li

doi:10.1117/12.482869

12 September 2002 Microprocessing by UV laser

Qihong Lou, Tiejun Li

Proceedings Volume 4915, Lasers in Material Processing and Manufacturing; (2002) https://doi.org/10.1117/12.482869
Event: Photonics Asia, 2002, Shanghai, China

Abstract

In this paper, the principles of laser-materials interaction by UV laser have been reviewed. In addition, several successful applications by using pulsed UV laser including surface treatment, surface ablation as well as formation of nanometer particles have been presented.

Citation Download Citation

Qihong Lou and Tiejun Li "Microprocessing by UV laser", Proc. SPIE 4915, Lasers in Material Processing and Manufacturing, (12 September 2002); https://doi.org/10.1117/12.482869

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available