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20 September 2002 Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile
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Abstract
An optical path difference (OPD) and the amplitude of sinusoidal wavelength-scanning are controlled with double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. A linear CCD image sensor is used to measure one-dimensional step-profiles in real-time. Two different step profiles with a step height of 1 μm and 20 μm, respectively, are measured with the measurement error less than 8 nm. Measuring time for one measuring point is 0.04 s.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Osami Sasaki, Kunihiro Honma, and Takamasa Suzuki "Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile", Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); https://doi.org/10.1117/12.465819
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