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10 September 2002 Microgripper for handling and assembly in MEMS produced by SU-8 technology
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Some of the most important steps in manufacturing microelectromechnical systems (MEMS) are their assembly and handling. With handling we mean the way we can safely, without damages, pick microparts of any shape or any kind of material, rotate them to the desired orientation and finally position them precisely on or connect them with other microparts. For these purposes, specially designed tools – microgrippers – are required. This paper presents the design, development, fabrication method using the SU8 technology and post-fabrication processes with the goal to obtain a new type of micro-gripper. This micro-gripper was produced for a handling and assembly station developed at the IMFT (TU Wien). To investigate the obtained structures we performed a "quality inspection" and a calibration of the gripper parameters. These investigations gave an important insight on such parameters as technology accuracy, parameter settings for the SU8 technology, the obtained properties of the structure and the functional features (elasticity and applied force). Based on this, possibilities for further quality improvements have been considered.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dragan Petrovic, Gordana Popovic, Tatjana Petrovic, Andreas Schneider, Ejaz Huq, Helmut Detter, and Friedrich Franek "Microgripper for handling and assembly in MEMS produced by SU-8 technology", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002);

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