Novel structure of passive ring waveguide resonator on silicon substrate

Wei Guo; Huilian Ma; Zhonghe Jin; Yanzhe Tang; Yuelin Wang

doi:10.1117/12.483190

10 September 2002 Novel structure of passive ring waveguide resonator on silicon substrate

Wei Guo, Huilian Ma, Zhonghe Jin, Yanzhe Tang, Yuelin Wang

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483190
Event: Photonics Asia, 2002, Shanghai, China

Abstract

A novel optical waveguide rectangular ring resonator is designed and fabricated in silicon-on-insulator (SOl). The resonator is composed of four straight waveguides connected by four 90° directional change-turning mirrors. This merged structure allows compact size and low loss. The input and output waveguides to couple energy into and out from the resonator are also designed and optimized in this work.

Citation Download Citation

Wei Guo, Huilian Ma, Zhonghe Jin, Yanzhe Tang, and Yuelin Wang "Novel structure of passive ring waveguide resonator on silicon substrate", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483190

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