Optical MEMS for high-end microspectrometers

Rainer Riesenberg; Andreas Wuttig; Guenter Nitzsche; Bernd Harnisch

doi:10.1117/12.483168

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10 September 2002 Optical MEMS for high-end microspectrometers

Rainer Riesenberg, Andreas Wuttig, Guenter Nitzsche, Bernd Harnisch

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Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483168
Event: Photonics Asia, 2002, Shanghai, China

Abstract

We discuss grating array spectral sensors as the most promising basic architecture for future high-end micro-spectrometers. New extensions of this architecture with 2D-detector arrays are presented. They increase the spectral resolution by sub-pixel imaging. Sub-pixel architectures allow miniaturization of the spectrometers and shift the limits significantly towards the diffraction limit to the grating. To fully employ this, the slit dimensions have to be in the order of a few wavelengths, for instance down to 2 ?m in the UV region, requiring micro-machined entrance apertures. Feasible entrance apertures are transmissive MEMS, such as static slit patterns, micro shutters or mechanical slit positioning systems.

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Rainer Riesenberg, Andreas Wuttig, Guenter Nitzsche, and Bernd Harnisch "Optical MEMS for high-end microspectrometers", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483168

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