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10 September 2002 Optical MEMS for high-end microspectrometers
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Abstract
We discuss grating array spectral sensors as the most promising basic architecture for future high-end micro-spectrometers. New extensions of this architecture with 2D-detector arrays are presented. They increase the spectral resolution by sub-pixel imaging. Sub-pixel architectures allow miniaturization of the spectrometers and shift the limits significantly towards the diffraction limit to the grating. To fully employ this, the slit dimensions have to be in the order of a few wavelengths, for instance down to 2 ?m in the UV region, requiring micro-machined entrance apertures. Feasible entrance apertures are transmissive MEMS, such as static slit patterns, micro shutters or mechanical slit positioning systems.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rainer Riesenberg, Andreas Wuttig, Guenter Nitzsche, and Bernd Harnisch "Optical MEMS for high-end microspectrometers", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483168
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