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We report on our investigations of spectrophotometric measurements in the vacuum UV. A commercially available VUV setup at Fraunhofer IOF is used to illustrate spectrally and angle-resolved reflection and transmission measurements together with an in-situ sample irradiation by a F2-excimer laser.
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Joerg Heber, Alexandre Gatto, Norbert Kaiser, "Spectrophotometry in the vacuum UV," Proc. SPIE 4932, Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, (30 May 2003); https://doi.org/10.1117/12.472400