Single-shot selective laser micromachining of filtered-arc-deposited TiN films from chromium underlayer

Andrew John Dowling; Muralidhar K. Ghantasala; Peter E. Evans; Jason P. Hayes; Erol C. Harvey; E. Derry Doyle

doi:10.1117/12.469051

13 November 2002 Single-shot selective laser micromachining of filtered arc deposited TiN films from chromium underlayer

Andrew John Dowling, Muralidhar K. Ghantasala, Peter E. Evans, Jason P. Hayes, Erol C. Harvey, E. Derry Doyle

Author Affiliations +

Proceedings Volume 4934, Smart Materials II; (2002) https://doi.org/10.1117/12.469051
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

This paper presents the results on single-shot laser micromachining of filtered arc deposited TiN films and compares the machining characteristics of the films deposited under partially and fully filtered conditions. Machining performance was evaluated in terms of patterning quality and the ability to perform selective removal of top TiN film with minimal interference to an underlying layer. TiN was arc-deposited onto silicon substrate with a chromium layer on the top. These films were analysed for their composition and microstructure using Rutherford Backscattering Spectroscopy (RBS) and Scanning Electron Microscopy (SEM) before and after laser machining. Under single shot conditions the effect of fluence on the machined features has been investigated. The results showed selective removal of TiN films with a single shot from the underlying Cr layer. Further, this work clearly shows a distinction between the laser machining characteristics of the films deposited under different filtering conditions and substrate temperatures.

Citation Download Citation

Andrew John Dowling, Muralidhar K. Ghantasala, Peter E. Evans, Jason P. Hayes, Erol C. Harvey, and E. Derry Doyle "Single-shot selective laser micromachining of filtered arc deposited TiN films from chromium underlayer", Proc. SPIE 4934, Smart Materials II, (13 November 2002); https://doi.org/10.1117/12.469051

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