Translator Disclaimer
14 November 2002 Hydrostatic actuation in MEMS
Author Affiliations +
Hydrostatic actuation is a novel method of actuation in Micro Electro Mechanical Systems (MEMS) and provides advantages over other actuation techniques in current use. Hydrostatic actuation utilises a contained pressurised medium to straighten a bent hollow beam, similar to the Bourdon tube used to measure pressure in the macro world. Research has commenced at RMIT University to design and fabricate a microgripper prototype to validate this work. To simplify the design of this microgripper a virtual prototype has been initiated. This paper looks at the work carried out and verification of this virtual prototype using mathematical and finite element modelling. Further work to be undertaken will also be discussed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Simon Mutzenich, Thurai Vinay, and Gary Rosengarten "Hydrostatic actuation in MEMS", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002);

Back to Top