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13 November 2002 Fabrication of microfluidic devise (diffuser or mixer) using aerosol deposition method
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Aerosol deposition method (ADM) is a high performance technique for fabricating of piezoelectric 1-100- micron- thick film on various kinds of substrate. High deposition rate (over 30 micron/min for area 5 mm × 5 mm), low process temperature (less than 600 °C) as well as micropatterning of PZT during deposition (without etching) are very attractive for MEMS, and micro-TAS applications. In this presentation, the performance of a Si diaphragm driven by PZT thick film deposited by ADM was investigated from the point of view of applications for micro-diffuser. To find optimum conditions of diffuser, 4 ~ 60-micron-thick PZT films were directly deposited onto 10 ~ 140-micron-thick Si substrate. Displacement of 65-micron-thick Si diaphragm ( 6 mm × 6 mm) driven by 14-micron-thick PZT film was 1.2 micron at 40 V ac at non-resonance frequency and was 24 micron at resonance of 22.4 kHz driven by 8 V. The influence of liquid loads on resonance frequency shift and fluidic follow were investigated as the first report.
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Jun Akedo and Maxim Lebedev "Fabrication of microfluidic devise (diffuser or mixer) using aerosol deposition method", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002);

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