Novel fabrication method for 3D microstructures using surface-activated bonding and its application to micromechanical parts

Takayuki Yamada; Mutsuya Takahashi; Takashi Ozawa; Satoshi Tawara; Takayuki Goto

doi:10.1117/12.469668

13 November 2002 Novel fabrication method for 3D microstructures using surface-activated bonding and its application to micro-mechanical parts

Takayuki Yamada, Mutsuya Takahashi, Takashi Ozawa, Satoshi Tawara, Takayuki Goto

Author Affiliations +

Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.469668
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

The purpose of this work is to demonstrate that a novel fabrication method for 3-D microstructures (FORMULA) is applicable to fabrication of micro mechanical parts with a large flexibility. This method is a kind of layer manufacturing method of thin films for metallic or dielectric microstructures using surface-activated bonding (SAB). The bonding interfaces of thin films are investigated by transmission electron microscope (TEM). Voids were observed at the interfaces of both pure aluminum films and Al-Cu alloy films. The ratio of void on the Al-Cu/Al-Cu interface is much larger than that of Al/Al interface, although the films have the same surface roughness of 3nm in Ra (average roughness). And approximately 10nm-thick amorphous intermediate layers were found at the interfaces. Furthermore, we have fabricated a micro gear of 900μm in diameter and 200μm in height, which is about ten times as large as our previous test pieces. Overhung structures such as a bridge structure and a cantilever were also fabricated without supporting layers beneath them.

Citation Download Citation

Takayuki Yamada, Mutsuya Takahashi, Takashi Ozawa, Satoshi Tawara, and Takayuki Goto "Novel fabrication method for 3D microstructures using surface-activated bonding and its application to micro-mechanical parts", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.469668

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