Strategy towards fusion of nano and micro systems

Isao Shimoyama

doi:10.1117/12.499601

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13 November 2002 Strategy towards fusion of nano and micro systems

Isao Shimoyama

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Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.499601
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

This report describes the strategy after the Micromachine Research and Development project. The proposal was made in a committee meeting primary attended by members of the Micromachine Center that was held last fiscal year. It is concluded that the combination of NANOstructures on MICROsystems (NANO-ON-MICRO) plays a very important role for nanotechnology as well as conventional manufacturing technology. To promote this strategic approach, the action taken immediately is mentioned as three in one: infrastructure, consulting service and grant for innovative ideas. The innovative ideas are surely appearing from the promising area of manufacturing, e.g. multimaterial MEMS/NEMS, 3D MEMS/NEMS, micro/nanomanipulation, and design/simulation.

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Isao Shimoyama "Strategy towards fusion of nano and micro systems", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.499601

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