Study of hot embossed microchannels using confocal microscopy

Irina Simdikova; Armin Kueper; Igor Sbarski; Erol C. Harvey; Jason P. Hayes

doi:10.1117/12.469671

13 November 2002 Study of hot embossed microchannels using confocal microscopy

Irina Simdikova, Armin Kueper, Igor Sbarski, Erol C. Harvey, Jason P. Hayes

Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.469671
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

Micro molding and hot embossing are among the most popular techniques for fabricating microstructures in polymeric materials, due to the relatively low cost of replication. In this paper we present an investigation of a hot embossing process including the optimisation of operating parameters for polystyrene (PS) and polycarbonate (PC) substrate materials. Nickel mold inserts were made via excimer-laser ablation and Ni electrodeposition. Replication of structures, such as channels with different aspect ratios, were investigated and experimental results are discussed.

Citation Download Citation

Irina Simdikova, Armin Kueper, Igor Sbarski, Erol C. Harvey, and Jason P. Hayes "Study of hot embossed microchannels using confocal microscopy", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.469671

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