Spectroellipsometrical measurement of large roughness surface

L. Yu. Melnichenko; B. B. Tytarchuk; Igor A. Shaykevich

doi:10.1117/12.486670

11 December 2002 Spectroellipsometrical measurement of large roughness surface

L. Yu. Melnichenko, B. B. Tytarchuk, Igor A. Shaykevich

Proceedings Volume 4938, Selected Papers from the International Conference on Spectroscopy of Molecules and Crystals; (2002) https://doi.org/10.1117/12.486670
Event: XV International School on Spectroscopy of Molecules and Crystals, 2001, Chernivsti, Ukraine

Abstract

Spectroellipsometrical measurements are usually made on smooth surfaces or surfaces with small roughness. Practical needs often demand measuring optical parameters of real details and products. The surface of these dtails and products is not mirror-like, but veyr rough, that is Ra greater than/equal to λ. This work shows possibility of ellipsometrical measurements on very rough surfaces. We proposed the method of ellipsometrical measurement of these surfaces and made investigations for metal rough plates and semiconductor surfaces of the anodized aluminum. The most common method of measurement of spectroellipsometrical parameters is the Beatty method and its different modifications. Therefore it is for this method that we work out our own principles.

Citation Download Citation

L. Yu. Melnichenko, B. B. Tytarchuk, and Igor A. Shaykevich "Spectroellipsometrical measurement of large roughness surface", Proc. SPIE 4938, Selected Papers from the International Conference on Spectroscopy of Molecules and Crystals, (11 December 2002); https://doi.org/10.1117/12.486670

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