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25 March 2003 Continuously tunable InP-based multiple air-gap MOEMS filters with ultrawide tuning range
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Abstract
Continuously tunable Fabry-Perot filters manufactured using multiple air-gap MOEMS technology are studied and presented. The InP/air-gap filters optimized for optical telecommunication systems using the third optical telecommunication window (1550nm) exhibit a wide tuning range of 142nm and an extremely wide stop-band of 550nm (1250nm-1800nm). The tuning is continuously adjustable requiring ultra-low actuation voltages between 0V (1599nm) and 3.2V (1457nm). The filters are based on a relatively simple vertical structure which is fabricated by few surface micro machining steps. No mirror alignment or subsequent micro mounting are necessary facilitating a compact batch process production.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Soeren Irmer, Juergen Daleiden, Ventzeslav Rangelov, Cornelia Prott, Friedhard Roemer, Martin Strassner, Amer Tarraf, and Hartmut Hillmer "Continuously tunable InP-based multiple air-gap MOEMS filters with ultrawide tuning range", Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); https://doi.org/10.1117/12.471977
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