Gripping tool for MEMS assembly with an absolute distance measurement sensor using a fiber optic WL interferometer with high measuring frequency

Tilo Pfeifer; Ubaldo Aleriano; Frank Depiereux

doi:10.1117/12.468417

25 March 2003 Gripping tool for MEMS Assembly with an absolute distance measurement sensor using a fibre optic WL interferometer with high measuring frequency

Tilo Pfeifer, Ubaldo Aleriano, Frank Depiereux

Author Affiliations +

Proceedings Volume 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly; (2003) https://doi.org/10.1117/12.468417
Event: Photonics Fabrication Europe, 2002, Bruges, Belgium

Abstract

Reduction in the size of produced parts, increases the difficulty for precise manufacturing observation-processes and it makes manufacturing control cycles even more complex. Among all the production steps for micro-systems, assembly seems to be specially affected with this manufacturing handicap. Usual sensors used for the macro-world have to be modified or redesigned in order to address its use for the micro-world. This document presents the integration of a white light interferometer into a flexible fibre-scope used already for process monitoring purposes and which is mounted into a gripping-tool. The goal is to achieve a linear measurement between a gripping-tool and a target-part during the assembly process of hybrid micro systems.

Citation Download Citation

Tilo Pfeifer, Ubaldo Aleriano, and Frank Depiereux "Gripping tool for MEMS Assembly with an absolute distance measurement sensor using a fibre optic WL interferometer with high measuring frequency", Proc. SPIE 4945, MEMS/MOEMS: Advances in Photonic Communications, Sensing, Metrology, Packaging and Assembly, (25 March 2003); https://doi.org/10.1117/12.468417

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