Application of the technology of excimer laser etching to fabricate three-dimensional microstructures

Jingqiu Liang; Zichun Le; Jingshong Yao; Yushu Zhang; Shurong Wang; Ping Zhang; YiHui Wu; Ming Xuan; Lijun Wang

doi:10.1117/12.478288

15 January 2003 Application of the technology of the excimer laser etching to fabricate the three-dimensional microstructures

Jingqiu Liang, Zichun Le, Jingshong Yao, Yushu Zhang, Shurong Wang, Ping Zhang, YiHui Wu, Ming Xuan, Lijun Wang

Author Affiliations +

Proceedings Volume 4979, Micromachining and Microfabrication Process Technology VIII; (2003) https://doi.org/10.1117/12.478288
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

In the present paper, the authors report their research on fabricating the three-dimensional microstructures on polymers by using the technology of excimer laser direct etching. A kind of mask structure called adhering mask, which can be used to fulfill the direct etching of polymers by a simpler optical system, is introduced. In addition, its fabrication process and optical system of the direct etching are also given in this paper. Finally the three-dimensional microstructures we fabricate by the technology are shown.

Citation Download Citation

Jingqiu Liang, Zichun Le, Jingshong Yao, Yushu Zhang, Shurong Wang, Ping Zhang, YiHui Wu, Ming Xuan, and Lijun Wang "Application of the technology of the excimer laser etching to fabricate the three-dimensional microstructures", Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); https://doi.org/10.1117/12.478288

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