Burn-in test reduction for the digital micromirror device (DMD)

Timothy J. Hogan; Paul Barker; Michael R. Douglass

doi:10.1117/12.478211

16 January 2003 Burn-in test reduction for the Digital Micromirror Device (DMD)

Timothy J. Hogan, Paul Barker, Michael R. Douglass

Proceedings Volume 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II; (2003) https://doi.org/10.1117/12.478211
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Burn-in test has long been used in the semiconductor industry to screen out manufacturing defects. MEMS technologies, such as the DMD, can also use burn-in test to eliminate infant mortality failures. Burn-in test and test systems are among the most costly however, and it is always under review to shorten time or increase efficiency without reducing effectiveness. Detailed failure mode analysis from many thousands of device test logs resulted in the development of a novel application of an observed stress factor. Burn-in test time was reduced 55% on high volume DMD products with increased test efficiency and effectiveness.

Citation Download Citation

Timothy J. Hogan, Paul Barker, and Michael R. Douglass "Burn-in test reduction for the Digital Micromirror Device (DMD)", Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); https://doi.org/10.1117/12.478211

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