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16 January 2003 Characterization of MOEMS devices for the instrumentation of next generation space telescope
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Proceedings Volume 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II; (2003)
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States
Instrumentation of the Next Generation Space Telescope (NGST) will include a Multi-Object Spectrograph (MOS) in order to record simultaneously several hundred spectra in a single observation run. The selection of the objects in the field of view will be done by a MOEMS-based device: a micro-shutter array (MSA). In Laboratoire d’Astrophysique de Marseille, we have developed since several years different tools for the modeling and the characterization of these MOEMS-based slit masks. We are now developing a new bench for the measurement of the contrast value. The contrast is the amount of non-selected flux from sky background and bright sources passing through the multi-slit device. Contrast measurement have been carried out on the micro-mirror array fabricated by Texas Instrument. We can address several parameters in our experiment, as the size of the source, its location with respect to the micro-elements, the wavelength, and the input and output pupil size. In order to measure the contrast, the micro-mirrors are tilted between the ON position (towards the spectrograph) and the OFF position (towards a light trap). Contrast exceeding 400 has been measured for a 10° ON/OFF angle and values exceeding 6000 for a 20° ON/OFF angle.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Frederic Zamkotsian, Julien Gautier, and Patrick Lanzoni "Characterization of MOEMS devices for the instrumentation of next generation space telescope", Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003);


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