Reliability and qualification of an integrated MEMS attenuator for optical component applications

Ryan Hickey; Heiko Fettig; James Wylde; Stephane J Legros; Robert E. Mallard; Heinz Nentwich; Christopher Hart

doi:10.1117/12.472728

16 January 2003 Reliability and qualification of an integrated MEMS attenuator for optical component applications

Ryan Hickey, Heiko Fettig, James Wylde, Stephane J Legros, Robert E. Mallard, Heinz Nentwich, Christopher Hart

Proceedings Volume 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II; (2003) https://doi.org/10.1117/12.472728
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

This paper describes a test system and presents preliminary results of a long-term reliability study of an electro-thermally actuated integrated MEMS optical attenuator. These tests are designed to address the specific failure modes and life prediction models required for "set and forget" components and to identify deficiencies that exist in the current telecom (Telcordia) testing standards as they apply to MEMS. The failure modes are activated by overstressing the devices to a much higher power than would be observed under normal operating conditions. The paper describes a multi-module experimental test station for exciting devices at up eight different power levels, both AC and DC. At set intervals devices are tested off-board to measure changes in actuator deflection and resistance over time. The preliminary results show that devices start to degrade at power levels 92% over operating power after 400 hours of stress.

Citation Download Citation

Ryan Hickey, Heiko Fettig, James Wylde, Stephane J Legros, Robert E. Mallard, Heinz Nentwich, and Christopher Hart "Reliability and qualification of an integrated MEMS attenuator for optical component applications", Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); https://doi.org/10.1117/12.472728

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