Design and fabrication of a large vertical-travel silicon inchworm microactuator for the Advanced Segmented Silicon Space Telescope

Eui-Hyeok Yang; Richard G. Dekany; Stephen Padin

doi:10.1117/12.476282

16 January 2003 Design and fabrication of a large vertical travel silicon inchworm microactuator for the Advanced Segmented Silicon Space Telescope

Eui-Hyeok Yang, Richard G. Dekany, Stephen Padin

Author Affiliations +

Proceedings Volume 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II; (2003) https://doi.org/10.1117/12.476282
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Future concepts for ultra-large lightweight space telescopes include the telescopes with segmented silicon mirrors. This paper describes a proof-of-concept inchworm actuator designed to provide nanometer resolution, high stiffness, large output force, long travel range, and compactness for ultraprecision positioning applications in space. A vertically actuating inchworm microactuator is proposed to achieve large actuation travel by incorporating compliant beam structures within a silicon wafer. An inchworm actuator unit consists of a piezoelectric stack actuator, a driver, a pair of holders, a slider, and a pair of polymer beams connected to a centrally clamped flexure beam. Deep reactive ion etch experiments have been performed for constructing the actuator.

Citation Download Citation

Eui-Hyeok Yang, Richard G. Dekany, and Stephen Padin "Design and fabrication of a large vertical travel silicon inchworm microactuator for the Advanced Segmented Silicon Space Telescope", Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); https://doi.org/10.1117/12.476282

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