Microfabricated recurve bimetallic actuator

Proyag Datta; Madhulika Sathe; Lakshmi Namburi; Elizabeth J. Podlaha; Sumanta Acharya; Michael C. Murphy

doi:10.1117/12.472869

16 January 2003 Microfabricated recurve bimetallic actuator

Proyag Datta, Madhulika Sathe, Lakshmi Namburi, Elizabeth J. Podlaha, Sumanta Acharya, Michael C. Murphy

Proceedings Volume 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II; (2003) https://doi.org/10.1117/12.472869
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

The objective of this work was to develop a thermally-driven bimetallic actuator for application in high temperature environments. The actuator was designed to drive distributed air flow control valves in a gas turbine combustor. The valves control localized cooling air flows in response to rises in temperature, leading to more uniform and complete combustion. The actuator is a passive thermo-mechanical device formed from bimorph elements concatenated in a recurve architecture to obtain the required forces and deflections. An electroplating process for depositing an Invar-like alloy in deep recess was developed and used in the fabrication of prototypes. Fabrication of additional protypes and testing are continuing.

Citation Download Citation

Proyag Datta, Madhulika Sathe, Lakshmi Namburi, Elizabeth J. Podlaha, Sumanta Acharya, and Michael C. Murphy "Microfabricated recurve bimetallic actuator", Proc. SPIE 4981, MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II, (16 January 2003); https://doi.org/10.1117/12.472869

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