Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors

Eui-Hyeok Yang; Kirill Shcheglov; Susan Trolier-McKinstry

doi:10.1117/12.473715

20 January 2003 Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors

Eui-Hyeok Yang, Kirill Shcheglov, Susan Trolier-McKinstry

Author Affiliations +

Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.473715
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Large-stroke micromachined deformable mirror technology can boost the imaging performance of an otherwise non-rigid, lower-quality telescope structure. The proposed deformable mirror concept in this paper combines a microfabricated large-stroke piezoelectric actuator with a reflective membrane “transferred” in its entirety from a separate wafer. This process allows the large-stroke actuation of the continuous membrane and can provide the necessary large wavefront correction. The micromachined deformable mirror approach allows mass-production of actuators as well as scalable structures with, high actuator densities. The piezoelectric unimorph actuator design approach delivers large actuator stroke with a highly localized influence function, while maintaining a surface figure of optical quality. Both of these component fabrication techniques are easily scaled to accommodate deformable mirrors with very large areas.

Citation Download Citation

Eui-Hyeok Yang, Kirill Shcheglov, and Susan Trolier-McKinstry "Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); https://doi.org/10.1117/12.473715

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