MOEMS spatial light modulator development at the Center for Adaptive Optics

Peter A. Krulevitch; Paul A. Bierden; Thomas Bifano; Emily Carr; Clara E. Dimas; Harold Dyson; Michael A. Helmbrecht; Peter Kurczynski; Richard S. Muller; Scot S. Olivier; Yves-Alain Peter; Bernard Sadoulet; Olav Solgaard; Eui-Hyeok Yang

doi:10.1117/12.478562

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20 January 2003 MOEMS spatial light modulator development at the Center for Adaptive Optics

Peter A. Krulevitch, Paul A. Bierden, Thomas Bifano, Emily Carr, Clara E. Dimas, Harold Dyson, Michael A. Helmbrecht, Peter Kurczynski, Richard S. Muller, Scot S. Olivier, Yves-Alain Peter, Bernard Sadoulet, Olav Solgaard, Eui-Hyeok Yang

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Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.478562
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

The National Science Foundation Center for Adaptive Optics (CfAO) is coordinating a program for the development of spatial light modulators suitable for adaptive optics applications based on micro-optoelectromechanical systems (MOEMS) technology. This collaborative program is being conducted by researchers at several partner institutions including the Berkeley Sensor & Actuator Center, Boston Micromachines, Boston University, Lucent Technologies, the Jet Propulsion Laboratory, and Lawrence Livermore National Laboratory. The goal of this program is to produce MEMS spatial light modulators with several thousand actuators that can be used for high-resolution wavefront control applications that would benefit from low device cost, small system size, and low power requirements. The two primary applications targeted by the CfAO are astronomy and vision science. In this paper, we present an overview of the CfAO MEMS development plan along with details of the current program status.

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Peter A. Krulevitch, Paul A. Bierden, Thomas Bifano, Emily Carr, Clara E. Dimas, Harold Dyson, Michael A. Helmbrecht, Peter Kurczynski, Richard S. Muller, Scot S. Olivier, Yves-Alain Peter, Bernard Sadoulet, Olav Solgaard, and Eui-Hyeok Yang "MOEMS spatial light modulator development at the Center for Adaptive Optics", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); https://doi.org/10.1117/12.478562

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