Fabrication of arbitrary three-dimensional photonic crystals by four-plane-wave interference

Yuzo Ono; Kiyokatsu Ikemoto

doi:10.1117/12.477855

17 January 2003 Fabrication of arbitrary three-dimensional photonic crystals by four-plane-waves interference

Yuzo Ono, Kiyokatsu Ikemoto

Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.477855
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

This paper describes that arbitrary three-dimensional photonic crystals, so called fourteen Bravais lattices, and even a diamond structure can be fabricated by recording the four plane-waves interference fringe. It is derived that the equation of maximum intensity point condition for interference fringe among four plane waves is the same as that between the lattice vectors and the reciprocal lattice vectors in the solid-state physics. This relation gives us the way to calculate the incident directions for four plane waves to fabricate any desired three-dimensional photonic crystal structures. The diamond structure consists of two same face centered cubic lattices, which are shifted by a quarter of their lattice constant to each other. This shift can be introduced by shifting the phases of four plane waves for interference. Therefore, the diamond structure can be fabricated by double exposures without and with phase shifts. Experimentally, a face centered cubic lattice structure was fabricated in the positive photoresist layer by using a He-Cd laser. The polarization directions of four beams were adjusted to obtain a maximum interference modulation depth. The SEM observation and the diffraction pattern observation of the fabricated sample show that the fabricated structure has a face centered cubic periodic structure.

Citation Download Citation

Yuzo Ono and Kiyokatsu Ikemoto "Fabrication of arbitrary three-dimensional photonic crystals by four-plane-waves interference", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); https://doi.org/10.1117/12.477855

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