Nanofabrication of integrated diffractive optical elements

Laurent Vaissie; Waleed Mohammed; Eric G. Johnson

doi:10.1117/12.477837

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17 January 2003 Nanofabrication of integrated diffractive optical elements

Laurent Vaissie, Waleed Mohammed, Eric G. Johnson

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Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.477837
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

We report on the design and fabrication of diffractive optical elements on high power broad area semiconductor lasers. Several issues related to the integrated diffractive elements fabrication by electron beam lithography and focused ion beam are discussed. We illustrate the flexibility of electron beam lithography by presenting results for beam focusing, splitting and tapering functions. An additional technique based on focused ion beam milling is presented for fabricating refractive lens elements onto the laser diode.

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Laurent Vaissie, Waleed Mohammed, and Eric G. Johnson "Nanofabrication of integrated diffractive optical elements", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); https://doi.org/10.1117/12.477837

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