MEMS raster correction scanner for SXGA resolution retinal scanning display

Hakan Urey; Frank A. DeWitt IV; Peggy Ann Lopez; Jason Tauscher

doi:10.1117/12.477811

20 January 2003 MEMS raster correction scanner for SXGA resolution retinal scanning display

Hakan Urey, Frank A. DeWitt IV, Peggy Ann Lopez, Jason Tauscher

Proceedings Volume 4985, MOEMS Display and Imaging Systems; (2003) https://doi.org/10.1117/12.477811
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A high-frequency resonant horizontal scanner and a linearly driven vertical scanner at display frame rates can create a 2-D raster for video display. The combined motion of the two scanners forms a sinusoidal raster in the vertical direction where the raster line spacing is uniform only at the center and becomes progressively nonuniform towards the left and right edges of the display screen. Nonuniformities degrade the image quality and can be corrected by the addition of a third scanner to the system. Last year we reported the requirements and some of the early results in our MEMS-based raster correction scanner development effort. Since then, a lot of progress was made and the scanner was successfully incorporated into an SXGA resolution helmet-mounted display system. In this paper we report the results of thick copper coil development, new coil and magnet design for electromagnetic actuator, thermal flatness testing, new mounting design, and finally the performance measurements for the HMD system with a raster correction scanner.

Citation Download Citation

Hakan Urey, Frank A. DeWitt IV, Peggy Ann Lopez, and Jason Tauscher "MEMS raster correction scanner for SXGA resolution retinal scanning display", Proc. SPIE 4985, MOEMS Display and Imaging Systems, (20 January 2003); https://doi.org/10.1117/12.477811

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