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19 June 2003 Rigorous coupled-wave analysis for multilayered grating structures
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Proceedings Volume 4987, Integrated Optics: Devices, Materials, and Technologies VII; (2003) https://doi.org/10.1117/12.473179
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States
Abstract
A numerically stable and systematic implementation of the rigorous coupled-wave analysis (RCWA) for the general multilayered grating structures is presented for both TE and TM modes. Numerical results of the approach are shown for the diffraction-based optical device as an example and are compared with the scalar diffraction method to illustrate the limited applicability of the scalar analysis.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wook Lee and Fahrettin Levent Degertekin "Rigorous coupled-wave analysis for multilayered grating structures", Proc. SPIE 4987, Integrated Optics: Devices, Materials, and Technologies VII, (19 June 2003); https://doi.org/10.1117/12.473179
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