Paper
30 May 2003 Applications of CMOS processing to realize functional on-chip optical interconnects for VLSI
Author Affiliations +
Abstract
VLSI/ULSI and the evolutions being driven by the International Technology Roadmap for Semiconductors (ITRS) are once again presenting severe challenges to the metal interconnect. Clock skew and other timing delays are becoming application critical design factors. The RC induced delays as well as parasitics (due to the trace density) are causing severe limitations to designs. Unfortunately these issues are very difficult to deal with using conventional computer aided design tools although efforts are being made, notably via DARPA funded programmes. We shall review techniques (and design elements) for on-chip optical communications. Through this we will present a new proposition for optical interconnects integrated upon otherwise conventional CMOS devices. We believe that the illustrated methodologies can be developed to provide very effective optical functionality appropriate to alleviating high-speed communications and timing issues.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Terry V. Clapp and Laurence W. Cahill "Applications of CMOS processing to realize functional on-chip optical interconnects for VLSI", Proc. SPIE 4997, Photonics Packaging and Integration III, (30 May 2003); https://doi.org/10.1117/12.479477
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KEYWORDS
Waveguides

Optical interconnects

Semiconductors

Dielectrics

Computer aided design

Optical communications

Copper

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