TiO2 waveguide with ZnO-ZnO:Al cladding for active optical subsystems

Gerrit Schoer; Hans Joachim Heider; Stefan Wiechmann; Joerg Mueller

doi:10.1117/12.475842

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9 July 2003 TiO₂ waveguide with ZnO-ZnO:Al cladding for active optical subsystems

Gerrit Schoer, Hans Joachim Heider, Stefan Wiechmann, Joerg Mueller

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Proceedings Volume 4998, Photonic Integrated Systems; (2003) https://doi.org/10.1117/12.475842
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States

Abstract

In this paper a tunable optic system is presented for use in various optical systems. In contrast to most of the tunable optical components which are composed of a waveguide, an electro-optical layer, and electrodes of different materials. The new system consists of a TiO₂ waveguide with ZnO as a functional layer on top. The TiO₂ layer acts as a high index waveguide, the ZnO system consists of a ZnO:Al/ZnO/ZnO:Al sandwich structure. The ZnO film is used as an electro-optical cladding for the TiO₂ waveguide while the two ZnO:Al films act as transparent electrodes. Applying a voltage results in a shift of the effective refractive index of the waveguide because of the electro-optical effect of the ZnO. The TiO₂ film is deposited on SiO₂ by a PECVD-process from a metal organic precursor CpTiCh (cyclopentadienyl-cycloheptatrienyl-titanium). ZnO and ZnO:Al are rf-sputtered from a Zn target and ZnO:Al target, respectively. While both ZnO layers are c-oriented polycrystals, the TiO₂ grows in a nanocrystalline formation without any texture. The configuration of the high index material TiO₂ in combination with the transparent and electro-optical ZnO layer allows the use in integrated optical subsystems such as active couplers or active micro ring resonators. The system is designed for a wavelength of 1550 nm.

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Gerrit Schoer, Hans Joachim Heider, Stefan Wiechmann, and Joerg Mueller "TiO₂ waveguide with ZnO-ZnO:Al cladding for active optical subsystems", Proc. SPIE 4998, Photonic Integrated Systems, (9 July 2003); https://doi.org/10.1117/12.475842

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