Fast-sampling multipixel detector for a heterodyne interferometer with angstrom precision

Oleg Soloviev; Gleb V. Vdovin; Lukas Max Krieg; Davies W. de Lima Monteiro; Joseph J. M. Braat; Patrick J. French

doi:10.1117/12.498238

8 July 2003 Fast-sampling multipixel detector for a heterodyne interferometer with angstrom precision

Oleg Soloviev, Gleb V. Vdovin, Lukas Max Krieg, Davies W. de Lima Monteiro, Joseph J. M. Braat, Patrick J. French

Proceedings Volume 5036, Photonics, Devices, and Systems II; (2003) https://doi.org/10.1117/12.498238
Event: Photonics, Devices, and Systems II, 2002, Prague, Czech Republic

Abstract

Standard heterodyne interferometer can be used as phase modulation subsystem in a novel interferometer designed to measure the figure of projecting mirrors with 0.1 nm accuracy. This article discusses possible operational principles of the sensor and presents experimental results for fast sampling type sensor prototype.

Citation Download Citation

Oleg Soloviev, Gleb V. Vdovin, Lukas Max Krieg, Davies W. de Lima Monteiro, Joseph J. M. Braat, and Patrick J. French "Fast-sampling multipixel detector for a heterodyne interferometer with angstrom precision", Proc. SPIE 5036, Photonics, Devices, and Systems II, (8 July 2003); https://doi.org/10.1117/12.498238

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